In this paper, a finite element code especially for micro-magnetostrictive actuators was developed. Two significant characteristics of the presented finite element code are: (1) the magnetostrictive hysteresis phenomenon is effectively taken into account; (2) intrinsic geometric feature of typical thin film structures of large length to thickness ratio, which makes it very difficult to construct finite element mesh in the region of the thin film, is considered reasonably in modeling micro-magneostrictive actuators. For verification purpose, magnetostrictive thin films were fabricated and tested in the form of a cantilevered actuator. The Tb-Fe film and Sm-Fe film are sputtered on the Si and Polyimide substrates individually. The magnetic and magnetostrictive properties of the sputtered magnetostrictive films are measured. The measured magnetostrictive coefficients are compared with the numerically calculated ones.
Silicon based magnetostrictive structures were fabricated for micro-wireless actuators,
and finite element models were developed to predict mechanical characteristics of the actuated
structures. These structures can be used to design wireless micro-vehicles and multi-function
packaged micro-devices. In the fabrication process, amorphous magnetostrictive films of the
optimized binary compound Tb0.4Fe0.6 and Sm0.47Fe0.53 were deposited with various thicknesses on
the silicon membrane by DC magnetron sputtering using cast composite targets. Magnetic fields
lower than 2KOe were applied for micro-system applications. These films have been tested in a
simple cantilever arrangement and the predicted magnetostrictions of the actuated membranes
through the developed FE models have been calculated.
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