The nonlinear absorptivity of FOTURAN glass to ultrashort laser pulses is evaluated by experimental measurement and thermal conduction model at different parameters including energy and repetition rate of the laser pulse, translation speed and thermal properties of the sample. The mechanical strength of an embedded laser-melted sample and an overlapped weld sample is determined by a three-point-bending test and a shear test, respectively. The results are related to the average absorbed laser power Wab. We found the mechanical strength of an overlapped weld joint to be as high as that of the base material for low Wab, if the sample pair is pre-bonded to provide optical contact.
Volume 3933ETIG QÜALI77 rES=3323D 4 ^ZOOO/ö/9 ocj REPORT DOCUMENTATION PAGE Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching data sources, garnering and maintaining the data needed, and completing and reviewing the collection of Information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden to Washington Headquarters Service, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget, Paperwork Reduction Project (0704-0188) Washington, DC 20503. (From -To) 15-01-2000 to 14-07-2000 PLEASE DO NOT RETURN YOUR FORM TO THE ABOVE ADDRESS. 1. REPORT DATE (DD-MM-YYYY) 08-06-2000 REPORT DATE Final Technical Report DATES COVERED TITLE AND SUBTITLELaser Applications in Microelectronic and Optoelectronic Manufacturing V 5a. CONTRACT NUMBER 5b. GRANT NUMBER F49620-00-1-0135 5c. PROGRAM ELEMENT NUMBER AUTHOR(S)Helvajian, Henry Sugioka, Koji Dubowski, Jan J. Gower, Malcom C.5d. PROJECT NUMBER 5e. TASK NUMBER 5f. WORK UNIT NUMBER PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES)Society of Photo-Optical Instrumentation Engineers PO Box 10 (SPIE) fielUngham. WA 98227-0010 PERFORMING ORGANIZATION REPORT NUMBERVolume 3933 SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES)Air SPONSOR/MONITOR'S ACRONYM(S)AFOSR/NE SPONSORING/MONITORING AGENCY REPORT NUMBER DISTRIBUTION AVAILABILITY STATEMENTApproved for Public Release SUPPLEMENTARY NOTESISBN 0-8194-3550-3 ABSTRACTThis proceedings contains papers on the following topics: fundamental processes of laser material interaction phenomenon, laser material processing techniques, pulsed-laser deposition, and laser microengineering. The latter topic was added to LAMOM V and reflects the srong growth in the application of lasers to micromachining, 3D fabrication, and microtexturing operations. SUBJECT TERMS IntroductionThe laser is currently in its fourth decade of development and is emerging as the tool of choice for material processing in the 21 st century. Laser processing is by nature an environmentally "clean" and in-situ processing approach. It has a very large dynamic range of processing size from a scale that can exceed the wavelength of light to dimensions measured in many square meters. It has also been shown to process a variety of materials, from delicate matter of biological origin to diamond, the hardest material known. Therefore, one can defend the notion that the laser, as a material processing tool, has advanced to a relatively mature stage to merit an annual review of its applicability to various material processing tasks. The Laser Applications in Microelectronics and Optoelectronics Manufacturing (LAMOM) conference series is an attempt to provide a common forum for both scientific and engineering exchange to address aspects of processing materials with lase...
An overview of the vast array of the laser material processing techniques is presented as they apply to fabricating structures in the micro and nanometer scale length domains. The overview covers developments from the past 20 years, and encompasses demonstrated processes where the use of the inherent properties of lasers has led to increased fidelity in the processing of materials. These demonstrated processes often use inventive approaches that rely on derivative aspects of established primary principals that govern laser/material interaction phenomena. By using these nuances in concert with the unique properties of lasers, a high level of finesse has been demonstrated in materials processing. The overview highlights by the use of selective examples those processes or techniques that appear to show scalability to the industrial environment.Keywords: laser processing, overview, micro/nanofabrication, IntroductionLasers have been used in materials processing for over 50 years, though in the early days, work was more focused on mitigating laser damage in materials as opposed to the processing of materials. However, the application of lasers to controllably alter materials was recognized early and as an industry, laser processing applications now lead world wide laser sales. The calendar 2005 totals for laser process tooling is near $6.0B USD 1 . Consequently, laser materials processing can no longer be considered a niche industry as there appears to be an increasing demand to apply laser processing solutions to manufacturing for specific value added segments. Commensurate with these industry trends is the fact that the number of conferences devoted to laser material processing continues to grow. This is a normative signal that industry is currently more amenable to applying laser based solutions into the manufacturing process. There are many factors that have contributed to this change in view over the course of the past 2 decades, the primary one being the advance of laser technology with a commensurate increase in system reliability. Figure 1 shows a graph that depicts the number of world wide publications per year that mention laser material processing in the title or the abstract. The data spans nearly 40 years. The results represent a lower value to the total number of publications because there could be publications that discuss laser material processing research or development but fail to mention it in the title or abstract. The data is from an assembled series of databases that includes not only journal articles but also government sponsored research articles from the USA, Japan (e.g. MITI), Germany (e.g. BMFT), France (e.g. CNRS), Canada (e.g. NRC), UK (e.g. Department of Industry) and others. This data supports the conclusion that laser material processing is an established field that could support nearly 400 publications per year.In this paper we explore a small segment of the overall laser material processing industry, namely the use and application of lasers in micro and nanofabrication. By their ver...
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