Magnetic fields are applied to inductively coupled plasma (ICP) to achieve high plasma densities using electromagnets. If the magnetic fields are set up such that the magnitude of magnetic flux density on the substrate decreases with both radial and axial distances from the substrate's center (here after referred to as M-ICP-A), the plasma density increases by 237% compared with that for ICP although the non-uniformity of the plasma density for M-ICP-A (11.1%) is higher than that for ICP (10.9%). As the rate of decrease in the magnitude of magnetic flux density on the substrate increases both radially and axially, the non-uniformity in the plasma density increases further. The increase in the non-uniformity for M-ICP-A was confirmed to arise from the flute instability. To suppress the flute instability, we arranged the magnitude of magnetic flux density on the substrate to increase with increasing distance from the substrate center both radially and axially (here after referred to as M-ICP-V). In this configuration, plasma fluctuations were not observed, hence the plasma density non-uniformity was lowered to 8.1%, although the measured plasma density was higher than that for M-ICP-A. The oxide etch-rate non-uniformity in M-ICP-V (2.5%) was also lower than that for ICP (5.2%) or that for M-ICP-A (21.4%).

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A double protecting layer composed of MgO layer deposited on top of the SrO prevents SrO from the contamination by air and as a result, low driving voltage and high luminous efficacy PDP can be realized albeit a much prolong aging time is required. We adopted a special process to reduce the long aging time for the PDP with SrO-MgO double protective layer and confirmed that it can be comparable to that of the single MgO layer. The panel showed much improved luminous efficacy at reduced voltages.

By varying the radio frequency-bias power in an inductively coupled CF 4 plasma, we have modified the nanoscale morphology and chemical bond structure of polyethylene terephthalate (PET) surface. Specifically, the ion impingement increased the surface roughness and created CF n (n = 2, 3) functional groups on the PET surface, making it hydrophobic. Also observed was a significant increase in the hydrophobicity of the plasmamodified surfaces over the course of several days following the treatment (a hydrophobic recovery). X-ray photoelectron spectroscopy analysis revealed that this spontaneous transformation to a more hydrophobic surface is accompanied by a decrease in the fluoride ion content. The change of plasma density and electron temperature with increasing bias power were discussed. In addition, the change of the ion energy distribution with increasing bias power was investigated.Index Terms-Hydrophobic recovery, ion energy distribution (IED), nanoscale morphology, polyethylene terephthalate (PET), radio frequency (RF)-bias power, X-ray photoelectron spectroscopy (XPS).