We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.
In this paper we report the recent progress in optical-beam scanning fibre interferometry technique for potential on-line nano scale surface measurement based on the previous research. It attempts to generate a robust and miniature measurement device for future development into a multi-probe array measurement system. In this research, both the Fibre-Optic-Interferometry and the Wavelength-Division-Multiplexing techniques have been used, so that the optical probe and the optical interferometer are well-spaced and fast surface scan can be carried out, allowing flexibility for on-line measurement. In addition, this system provides a self-reference signal to stabilize the optical detection with high common-mode noise suppression by adopting an active phase tracking and stabilization technique. Low-frequency noise was significantly reduced compared with unstabilized result. The measurement of a sample surface also shows a repeatability of 3.3nm.
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