Macro–micro dual-drive technology uses a micro-drive system to compensate for motion errors of a macro-drive system, solving the contradiction between large travel and high-precision motion. Additionally, it has a wide range of applications in the ultra-precision field. Therefore, it is necessary to analyze and research the ultra-precision macro–micro dual-drive system. Firstly, this paper analyzes the history of ultra-precision technology development and summarizes the research status of ultra-precision technology processing and application. Secondly, the micro-drive mechanism design and macro–micro-drive mode of macro–micro dual-drive technology, which can solve the contradiction of large stroke and high precision, are reviewed, and the application of macro–micro dual-drive technology in an ultra-precision system is summarized. Finally, the challenges and development trends of the ultra-precision macro–micro dual-drive system are analyzed. The research in this paper will play an important role in promoting the development of the ultra-precision system and macro–micro dual-drive technology.

At present, there are shortcomings in the research of micro-drive amplification mechanism, such as insufficient precision and additional force. In this paper, a kind of micro-drive amplification mechanism is designed and its positioning accuracy is simulated. Firstly, a kind of micro-drive amplification mechanism is designed, which can accurately transform the input displacement of piezoelectric ceramic actuator (PZT) into the output displacement of a certain number of amplification. the theoretical motion magnification ratio of the mechanism is 3:1. Secondly, the kinematics and simulation of the mechanism were studied, and the conversion performance of the mechanism was analyzed. The results showed that the micro-drive amplification mechanism has the advantage of high positioning accuracy (maximum positioning error is 4.67%). Finally, through strength analysis and modal analysis, the performance of micro-drive amplification mechanism is studied. This study has some reference value for the research and application of precision micro-drive amplification mechanism.