Silicon sensors can be fabricated as small, rugged and reliable chip devices with a broad field of applications in medicine, biotechnology, food analysis and environmental monitoring. Thus, there is an increasing demand in realizing such sensors for the determination of, e.g. chemical and biological quantities in aqueous solutions. By developing semiconductor-based field-effect structures, moreover, their main advantage is due to the combination of both the physical effect as the transducer principle and the deposition of the sensitive layers directly onto the silicon chip. In this work, different sensor types that are originated from the field effect are presented: The capacitive ElS (electrolyte-insulator-semiconductor) sensor is suitable for the pH detection using the capacitance/voltage technique. By immobilizing an additional enzyme layer, e.g. of penicillinase, a biosensor has been realized. Both sensors can be integrated as an EIS sensor array. The utilization of the porous silicon technology offers the possibility of a further miniaturization. The LAPS (light-addressable potentiometric sensor) is based on the identical ElS structure. Here, each measuring point on the surface can be arbitrarily addressed by a probing light. The resulting photocurrent is generated as the sensor signal. This arrangement also allows a two-dimensional mapping of the spatial distribution of ions or molecules.
The influence of Si-doping on the growth and material characteristics of InAs nanowires deposited by metal-organic vapor phase epitaxy (MOVPE) was investigated. It was observed that above a certain partial pressure ratio, doping has an influence on the morphology. The nanowires exhibit better uniformity but lower height vs. diameter aspect ratio as the supply of the dopant increases. It was consistantly found that the specific conductance of the nanowires also increases. Moreover the electrical measurements showed a transition from semiconducting to metallic behavior in the case of highly doped nanowires.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.