In this work, a multi-sensor chip for the investigation of the sensing properties of different types of metal oxides towards hydrogen peroxide in the ppm range is presented. The fabrication process and physical characterization of the multisensor chip are described. Pure SnO 2 and WO 3 as well as Pdand Pt-doped SnO 2 films are characterized in terms of their sensitivity to H 2 O 2 . The sensing films have been prepared by drop-coating of water-dispensed nano-powders. A physical characterization, including scanning electron microscopy and X-ray diffraction analysis of the deposited metal-oxide films, was done. From the measurements in hydrogen peroxide atmosphere, it could be shown, that all of the tested metal oxide films are suitable for the detection of H 2 O 2 in the ppm range. The highest sensitivity and reproducibility was achieved using Pt-doped SnO 2 .Calibration plot of a SnO 2 , WO 3 , Pt-, and Pd-doped SnO 2 gas sensor for H 2 O 2 concentrations in the ppm range.
The presented work focuses on the development of a multisensor system for the evaluation of aseptic processes employing hydrogen peroxide vapour. In a first step, selected commercially available gas sensors have been investigated on crosssensitivity towards hydrogen peroxide vapour and humidity. An MOX (TGS 816, Figaro) and a solid-electrolyte gas sensor (SO-A0-250, Electrovac) (l-probe) have shown good characteristics in terms of sensitivity towards HPV, considering also reproducibility, long-term drift and stability. Further, the sterilization effect of HPV has been investigated by means of the microbial reduction test. A correlation between the microbial reduction of Bacillus subtilis spores and the sensor response in hydrogen peroxide atmosphere has been established. Based on this correlation the microbial reduction may be estimated by means of the sensor output over a wide range of parameters.
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