TiO₂ nanoparticle layers composed of columnar TiO₂ nanoparticle piles separated with nanoscale pores were fabricated on the bottom surface of the hemispherical glass prism by performing gas phase cluster beam deposition at glancing incidence. The porosity as well as the refractive index of the nanoparticle layer was precisely tuned by the incident angle. Effective extraction of the light trapped in the substrate due to total internal reflection with the TiO₂ nanoparticle layers was demonstrated and the extraction efficiency was found to increase with the porosity. An enhanced Rayleigh scattering mechanism, which results from the columnar aggregation of the nanoparticles as well as the strong contrast in the refractive index between pores and TiO₂ nanoparticles in the nanoporous structures, was proposed. The porous TiO₂ nanoparticle coatings were fabricated on the surface of GaN LEDs to enhance their light output. A nearly 92% PL enhancement as well as a 30% EL enhancement was observed. For LED applications, the enhanced light extraction with the TiO₂ nanoparticle porous layers can be a supplement to the microscale texturing process for light extraction enhancement.
A hybrid patterned ZnO micro-cylinders and nanorods array (MCNR) was fabricated to improve the light extraction efficiency for high brightness GaN-based light-emitting diodes (LEDs). The light extraction efficiency of the LEDs with the ZnO MCNR is increased by 86.4% compared with conventional planar LEDs. LEDs with ZnO MCNR have greater light extraction efficiency than those only with ZnO micro-cylinders or ZnO nanorods array. The optical-electrical characteristics and far-field radiation patterns are measured and analyzed. The local optical field distribution patterns of the LEDs with ZnO microcylinders, ZnO nanorods, and ZnO MCNR are investigated using confocal scanning electroluminescence microscopy. The higher light extraction enhancement effect of ZnO MCNR is attributed to that it combines the light outputting effect from side walls of ZnO micro-cylinders and the light scattering effect of ZnO nanorods array.Index Terms-GaN-based light-emitting diodes (LEDs), light extraction, zinc oxide (ZnO), patterned micro-cylinders, nanorods array.
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