We developed novel cone‐shaped emitters with individual carbon nanotips using the resist‐assisted patterning process. The novel cone‐shaped nanotip emitters were arranged in an array with many nano emitters in pre‐patterned diameters of 3 μm. The cone‐shaped nanotip emitters consist of a number of carbon‐based nanostructures such as nanotubes and/or nanofibers with silicon and nitrogen elements at the periphery of each element. The cone‐shaped nano‐emitters strongly adhered to the substrate due to the large area bottom contact which is covered with diffused silicon elements. The growth mechanism and enhanced electron emission of cone‐shaped nanotip emitters was discussed.
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