Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past, several micro- and nano-gas sensors have been proposed and investigated where each type of sensor exhibits various advantages and limitations in sensing resolution, operating power, response, and recovery time. This paper presents an overview of the recent progress made in a wide range of gas-sensing technology. The sensing functionalizing materials, the advanced micro-machining fabrication methods, as well as their constraints on the sensor design, are discussed. The sensors’ working mechanisms and their structures and configurations are reviewed. Finally, the future development outlook and the potential applications made feasible by each category of the sensors are discussed.

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

This work is a comprehensive review of sensing materials, which interact with several target gases pertinent to agricultural monitoring applications. Sensing materials which interact with carbon dioxide, water vapor (relative humidity), hydrogen sulfide, ethylene and ethanol are the focus of this work. Performance characteristics such as dynamic range, recovery time, operating temperature, long-term stability and method of deposition are discussed to determine the commercial viability of the sensing materials considered in this work. In addition to the sensing materials, deposition methods are considered to obtain the desired sensing material thickness based on the sensor’s mechanism of operation. Various material classes including metal oxides, conductive polymers and carbon allotropes are included in this review. By implementing multiple sensing materials to detect a single target analyte, the issue of selectivity due to cross sensitivity can be mitigated. For this reason, where possible, it is desirable to utilize more than one sensing material to monitor a single target gas. Among those considered in this work, it is observed that PEDOT PSS/graphene and TiO2-coated g-C3N4 NS are best suited for CO2 detection, given their wide dynamic range and modest operating temperature. To monitor the presence of ethylene, BMIM-NTf2, SWCNTs and PtTiO2 offer a dynamic range most suitable for the application and require no active heating. Due to the wide dynamic range offered by SiO2/Si nanowires, this material is best suited for the detection of ethanol; a gas artificially introduced to prolong the shelf life of the harvested crop. Finally, among all other sensing materials investigated, it observed that both SWCNTs and CNTs/SnO2/CuO are most suitable for H2S detection in the given application.

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With the development of technology, systems gravitate towards increasing in their complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic devices have adhered to this trend of advancement. Ultrasonic systems require transducers to generate and sense ultrasonic signals. These transducers heavily impact the system’s performance. Advancements in microelectromechanical systems have led to the development of micromachined ultrasonic transducers (MUTs), which are utilized in miniaturized ultrasound systems. Piezoelectric micromachined ultrasonic transducers (PMUTs) exhibit higher capacitance and lower electrical impedance, which enhances the transducer’s sensitivity by minimizing the effect of parasitic capacitance and facilitating their integration with low-voltage electronics. PMUTs utilize high-yield batch microfabrication with the use of thin piezoelectric films. The deposition of thin piezoelectric material compatible with complementary metal-oxide semiconductors (CMOS) has opened novel avenues for the development of miniaturized compact systems with the same substrate for application and control electronics. PMUTs offer a wide variety of applications, including medical imaging, fingerprint sensing, range-finding, energy harvesting, and intrabody and underwater communication links. This paper reviews the current research and recent advancements on PMUTs and their applications. This paper investigates in detail the important transduction metrics and critical design parameters for high-performance PMUTs. Piezoelectric materials and microfabrication processes utilized to manufacture PMUTs are discussed. Promising PMUT applications and outlook on future advancements are presented.