In the chemical mechanical polishing process (CMP) ,the groove shape of polishing pad is one of the most critical elements that directly influences the quality and efficiency of CMP. This review paper describes the basic patterns of groove shape and that the patterns shape of polishing pad how to effect on quality and efficiency of CMP. The effect comparison between various sorts of groove shape and their effects on polishing is described. It is intended to help reader to gain a more comprehensive view on groove shape of polishing pad, and to be instrumental for research and development new groove shape of polishing pad for CMP.
Three evaluation indexes energy quality factor, energy grade utilization rate, matching degree can be built according to the high energy with high use, low energy with low use and taste counterpart to. Energy quality factor can quantify the energy grade of energy supply system. Energy grade utilization rate can embody rational use of terminal energy performance in the form of visual comparison. Energy grade matching degree quantitative express the link between building energy supply system and the building actual energy situation, and it directly reflects the rationality in different systems. Based on the three indicators, a scientific and reasonable evaluation method can be built with reasonable use for guiding ideology.
The aim of study was to measure the suitability and energy saving of soil source heat pump. We established a tube group model of underground temperature field in 20 years. Take three typical architecture--tavern, office and hotel buildings for example, used the primary energy ratio--one index about energy-savingas the main target of comparison, then took the technical indicators soil cumulative temperature into account. The result shows that the shopping malls in Beijing is the best grade of the applicability about the soil source heat pumps application, followed by hotel and office building is the worst.
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