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We report a fabrication process and characterization of the Josephson parametric amplifier (JPA) for the single-shot quantum state measurement of superconducting multiqubit system. The device is prepared using Nb film as its base layer, which is convenient in the sample patterning process like e-beam lithography and film etching. Our results show that the JPA has a bandwidth up to 600 MHz with gain above 15 dB and noise temperature approaching the quantum limit. The qubit state differentiation measurements demonstrate the signal-to-noise ratio around 3 and the readout fidelity above 97% and 91% for the ground and first-excited states, respectively.

Superconducting transmon qubits are the leading platform in solid-state quantum computing and quantum simulation applications. In this work, we develop a fabrication process for the transmon multiqubit device with a niobium base layer, shadow-evaporated Josephson junctions, and airbridges across the qubit control lines to suppress crosstalk. Our results show that these multiqubit devices have well-characterized readout resonators, and that the energy relaxation and Ramsey (spin-echo) dephasing times are up to ∼ 40 µs and 14 (47) µs, respectively. We perform single-qubit gate operations that demonstrate a maximum gate fidelity of 99.97%. In addition, two-qubit vacuum Rabi oscillations are measured to evaluate the coupling strength between qubits, and the crosstalk among qubits is found to be less than 1% with the fabricated airbridges. Further improvements in qubit coherence performance using this fabrication process are also discussed.

Over the past two decades significant advances have been made in the research of superconducting quantum computing and quantum simulation, in particular of the device design and fabrication that leads to ever-increasing superconducting qubit coherence times and scales. With Google's announcement of the realization of "quantum supremacy", superconducting quantum computing has attracted even more attention. Superconducting qubits are macroscopic objects with quantum properties such as quantized energy levels and quantum-state superposition and entanglement. Their quantum states can be precisely manipulated by tuning the magnetic flux, charge, and phase difference of the Josephson junctions with nonlinear inductance through electromagnetic pulse signals, thereby implementing the quantum information processing. They have advantages in many aspects and are expected to become the central part of universal quantum computing. Superconducting qubits and auxiliary devices prepared with niobium or other hard metals like tantalum as bottom layers of large-area components have unique properties and potentials for further development. In this paper the research work in this area is briefly reviewed, starting from the design and working principle of a variety of superconducting qubits, to the detailed procedures of substrate selection and pretreatment, film growth, pattern transfer, etching, and Josephson junction fabrication, and finally the practical superconducting qubit and their auxiliary device fabrications with niobium base layers are also presented. We aim to provide a clear overview for the fabrication process of these superconducting devices as well as an outlook for further device improvement and optimization in order to help establish a perspective for future progress.