The aberration-corrected scanning transmission electron microscope (STEM) has emerged as a key tool for atomic resolution characterization of materials, allowing the use of imaging modes such as Z-contrast and spectroscopic mapping. The STEM has not been regarded as optimal for the phase-contrast imaging necessary for efficient imaging of light materials. Here, recent developments in fast electron detectors and data processing capability is shown to enable electron ptychography, to extend the capability of the STEM by allowing quantitative phase images to be formed simultaneously with incoherent signals. We demonstrate this capability as a practical tool for imaging complex structures containing light and heavy elements, and use it to solve the structure of a beam-sensitive carbon nanostructure. The contrast of the phase image contrast is maximized through the post-acquisition correction of lens aberrations. The compensation of defocus aberrations is also used for the measurement of three-dimensional sample information through post-acquisition optical sectioning.
We report on a new camera that is based on a pnCCD sensor for applications in scanning transmission electron microscopy. Emerging new microscopy techniques demand improved detectors with regards to readout rate, sensitivity and radiation hardness, especially in scanning mode. The pnCCD is a 2D imaging sensor that meets these requirements. Its intrinsic radiation hardness permits direct detection of electrons. The pnCCD is read out at a rate of 1,150 frames per second with an image area of 264 × 264 pixel. In binning or windowing modes, the readout rate is increased almost linearly, for example to 4,000 frames per second at 4× binning (264 × 66 pixel). Single electrons with energies from 300 keV down to 5 keV can be distinguished due to the high sensitivity of the detector. Three applications in scanning transmission electron microscopy are highlighted to demonstrate that the pnCCD satisfies experimental requirements, especially fast recording of 2D images. In the first application, 65,536 2D diffraction patterns were recorded in 70 s. STEM images corresponding to intensities of various diffraction peaks were reconstructed. For the second application, the microscope was operated in a Lorentz-like mode. Magnetic domains were imaged in an area of 256 × 256 sample points in less than 37 seconds for a total of 65,536 images each with 264 × 132 pixels. Due to information provided by the two-dimensional images, not only the amplitude but also the direction of the magnetic field could be determined. In the third application, millisecond images of a semiconductor nanostructure were recorded to determine the lattice strain in the sample. A speed-up in measurement time by a factor of 200 could be achieved compared to a previously used camera system.
We demonstrate the ability to record a tomographic tilt series containing 3487 images in only 3.5 s by using a direct electron detector in a transmission electron microscope. The electron dose is lower by at least one order of magnitude when compared with that used to record a conventional tilt series of fewer than 100 images in 15–60 minutes and the overall signal-to-noise ratio is greater than 4. Our results, which are illustrated for an inorganic nanotube, are important for ultra-low-dose electron tomography of electron-beam-sensitive specimens and real-time dynamic electron tomography of nanoscale objects with sub-ms temporal resolution.
Recent development in fast pixelated detector technology has allowed a two dimensional diffraction pattern to be recorded at every probe position of a two dimensional raster scan in a scanning transmission electron microscope (STEM), forming an information-rich four dimensional (4D) dataset. Electron ptychography has been shown to enable efficient coherent phase imaging of weakly scattering objects from a 4D dataset recorded using a focused electron probe, which is optimised for simultaneous incoherent Z-contrast imaging and spectroscopy in STEM. Therefore coherent phase contrast and incoherent Z-contrast imaging modes can be efficiently combined to provide a good sensitivity of both light and heavy elements at atomic resolution. In this work, we explore the application of electron ptychography for atomic resolution imaging of strongly scattering crystalline specimens, and present experiments on imaging crystalline specimens including samples containing defects, under dynamical channelling conditions using an aberration corrected microscope. A ptychographic reconstruction method called Wigner distribution deconvolution (WDD) was implemented. Experimental results and simulation results suggest that ptychography provides a readily interpretable phase image and great sensitivity for imaging light elements at atomic resolution in relatively thin crystalline materials.
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