We have combined two high transmission planar x-ray waveguides glued onto each other in a crossed geometry to form an effective quasi-point source. From measurements of the far-field diffraction pattern, the phase and amplitude of the near-field distribution is retrieved using the error-reduction algorithm. In agreement with finite difference field simulations (forward calculation), the reconstructed exit wave intensity distribution (inverse calculation) exhibits a full width at half maximum (FWHM) below 15 nm in both dimensions. Finally, holographic imaging is successfully demonstrated for the crossed waveguide device by translation of a lithographic test structure through the waveguide beam.

The propagation of hard X-ray synchrotron beams in waveguides with guiding layer diameters in the 9-35 nm thickness range has been studied. The planar waveguide structures consist of an optimized two-component cladding. The presented fabrication method is suitable for short and leak-proof waveguide slices with lengths (along the optical axis) in the sub-500 mm range, adapted for optimized transmission at photon energies of 11.5-18 keV. A detailed comparison between finite-difference simulations of waveguide optics and the experimental results is presented, concerning transmission, divergence of the waveguide exit beam, as well as the angular acceptance. In a second step, two crossed waveguides have been used to create a quasi-point source for propagation-based X-ray imaging at the new nano-focus endstation of the P10 coherence beamline at Petra III. By inverting the measured Fraunhofer diffraction pattern by an iterative error-reduction algorithm, a two-dimensional focus of 10 nm  10 nm is obtained. Finally, holographic imaging of a lithographic test structure based on this optical system is demonstrated.

Abstract.We report the commissioning of the novel holography endstation for the P10 coherence beamline at PETRA III at DESY. The experimental imaging scheme is based on a highly coherent and divergent (cone) beam illumination, achieved by fixed-curvature focusing mirrors with additional spatial and coherence filtering by x-ray waveguides. The optical elements along the beam path and the instrument in commissioning are described. First experimental results are shown.

We have studied the spatial coherence properties of a nano-focused x-ray beam by grating (Talbot) interferometry in projection geometry. The beam is focused by a fixed curvature mirror system optimized for high flux density under conditions of partial coherence. The spatial coherence of the divergent exit wave emitted from the mirror focus is measured by Talbot interferometry The results are compared to numerical calculations of coherence propagation. In view of imaging applications, the magnified in-line image of a test pattern formed under conditions of partial coherence is analyzed quantitatively. Finally, additional coherence filtering by use of x-ray waveguides is demonstrated. By insertion of x-ray waveguides, the beam diameter can be reduced from typical values of 200 nm to values below 15 nm. In proportion to the reduction in the focal spot size, the numerical aperture (NA) of the projection imaging system is increased, as well as the coherence length, as quantified by grating interferometry.

Author(s) of this paper may load this reprint on their own web site or institutional repository provided that this cover page is retained. Republication of this article or its storage in electronic databases other than as specified above is not permitted without prior permission in writing from the IUCr.For further information see http://journals.iucr.org/services/authorrights.html Journal of Applied Crystallography covers a wide range of crystallographic topics from the viewpoints of both techniques and theory. The journal presents papers on the application of crystallographic techniques and on the related apparatus and computer software. For many years, the Journal of Applied Crystallography has been the main vehicle for the publication of small-angle scattering papers and powder diffraction techniques. The journal is the primary place where crystallographic computer program information is published.Crystallography Journals Online is available from journals.iucr.org J. Appl. Cryst. (2012 The micro-and nanofocus X-ray scattering (MINAXS) beamline of PETRA III is equipped with two consecutively arranged endstations, the last of which is the nanofocus endstation. The first in-beam commissioning of the experimental equipment was successfully performed at the end of 2010, using twodimensionally confining hard X-ray silicon waveguides with cross sections of 50 nm  50 mm to 50 nm  2 mm for nanobeam generation. A full characterization of the waveguide-generated beams was performed, giving values for the beam geometries, the transmission efficiencies of the waveguides and absolute fluxes. Along with these results a detailed description of the setup is presented in this paper. A first high-resolution nanodiffraction experiment on a nanocrystalline TiN hard coating was performed to verify the resolution of the nanodiffraction setup and to reveal the local gradients across the blasted TiN coating. In conclusion, the main concern is the availability of the nanobeam, how it was generated and the fact that a beam out of a two-dimensionally confining waveguide was used for diffraction experiments for the first time.