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Abstract180 keV Mn+ ions were implanted in silica glass at doses ranging from 1×1016 to 2×1017 ions/cm2 at room temperature. The coordination structure of implanted Mn atoms was studied by X-ray absorption spectroscopy. It was found that Mn atoms were mainly coordinated by O atoms in silica glasses as-implanted at doses lower than 5×1016Mn+ions/cm2. The Mn-O bond distance was 2.07 Å and the coordination number was 4.3 in average. Mn atoms were mainly coordinated by Mn and O atoms in the glasses as-implanted at doses higher than 1×1017 Mn+ions/cm2. In all the glasses, Mn atoms which are coordinated by O atoms were present as divalent state. After heating at 700 °C in air, Mn atoms were present as trivalent state and tended to form oxide crystals.