A sensor suitable for online monitoring of viscosity and density of glycerol-water mixtures is presented. The device is based on Lorentz force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. Two of the plate-carrying springs comprise piezoresistors. With two additional resistors on the silicon rim they form a half Wheatstone-bridge. Through the conductive layer of the beam springs a sinusoidal excitation current is driven. In the field of a permanent magnet, the Lorentz force excites plate vibrations resulting in a bridge unbalance. We recorded both the frequency response of the amplitude and the phase of the bridge output. By evaluating the properties of the resonant system, it is possible to extract the glycerol percentage and, hence, the viscosity and the mass density of the mixtures. This work is an extended version of the paper originally presented at SPIE
List of symbols
Increasing demands for online monitoring of liquids have not only resuted in many new devices relying on well-established sensing parameters like shear viscosity but also initiated research on alternative parameters. Recently, the longitudinal viscosity has been evaluated as a promising candidate because the devices arising enable the bulk of the liquid to be probed rather than a thin surface layer. We report on a multi-purpose sensor which allows simultaneous measurement of the sound velocity and longitudinal viscosity of liquids. The device embodiment features a cube-shaped chamber containing the sample liquid, where one boundary surface carries a flush-mounted PZT transducer. In operation, the transducer induces standing, resonant pressure waves in the liquid under test. We studied the influences of sound velocity and longitudinal viscosity on the generated pressure waves by means of the Navier–Stokes equation for adiabatic compressible liquids and exploited both parameters as the basic sensing mechanism. Furthermore, a three-port network model describing the interaction of the transducer and sample liquid was developed in order to be applied for extracting the parameters of interest from the raw measurement data. Finally, we demonstrate the device and method by carrying out and discussing test measurements on glycerol–water solutions.
Ultrasonic sensors can be used to determine physical fluid parameters like viscosity, density, and speed of sound. In this contribution, we present the concept for an integrated sensor utilizing pressure waves to sense the characteristic acoustic impedance of a fluid. We note that the basic setup generally allows to determine the longitudinal viscosity and the speed of sound if it is operated in a resonant mode as will be discussed elsewhere. In this contribution, we particularly focus on a modified setup where interferences are suppressed by introducing a wedge reflector. This enables sensing of the liquid's characteristic acoustic impedance, which can serve as parameter in condition monitoring applications. We present a device model, experimental results and their evaluation.
We report on simulation-based sensor design and measurement results of a bidirectional micromachined hot-film anemometer. The device is based on a thin-film thermistor made of amorphous germanium embedded in a silicon nitride membrane. The germanium structure is divided by metal-strip electrodes into four thermistor segments which are connected to a Wheatstone bridge. The sensor combines hot-film and calorimetric transduction principles. The flow dependent cooling of the hot film results in a unipolar, strictly monotonic transduction characteristic which is utilized for flow velocity measurements. Moreover, convective heat transfer between the hot-film segments causes thermal asymmetry yielding a bridge detuning voltage with a bipolar characteristic where its sign corresponds to the flow direction. Consequently, the sensor features a strictly monotonic transduction characteristic over a wide flow velocity range combined with simultaneous detection of the flow direction. The device was characterized in constant-current and constant-temperature operating modes for stationary flows as well as step-like changes of the flow velocity. The sensor behaviour as a result of ambient temperature variations was studied in detail.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.