After many years of fusion research, the conditions needed for a D–T fusion reactor have been approached on the Tokamak Fusion Test Reactor (TFTR) [Fusion Technol. 21, 1324 (1992)]. For the first time the unique phenomena present in a D–T plasma are now being studied in a laboratory plasma. The first magnetic fusion experiments to study plasmas using nearly equal concentrations of deuterium and tritium have been carried out on TFTR. At present the maximum fusion power of 10.7 MW, using 39.5 MW of neutral-beam heating, in a supershot discharge and 6.7 MW in a high-βp discharge following a current rampdown. The fusion power density in a core of the plasma is ≊2.8 MW m−3, exceeding that expected in the International Thermonuclear Experimental Reactor (ITER) [Plasma Physics and Controlled Nuclear Fusion Research (International Atomic Energy Agency, Vienna, 1991), Vol. 3, p. 239] at 1500 MW total fusion power. The energy confinement time, τE, is observed to increase in D–T, relative to D plasmas, by 20% and the ni(0) Ti(0) τE product by 55%. The improvement in thermal confinement is caused primarily by a decrease in ion heat conductivity in both supershot and limiter-H-mode discharges. Extensive lithium pellet injection increased the confinement time to 0.27 s and enabled higher current operation in both supershot and high-βp discharges. Ion cyclotron range of frequencies (ICRF) heating of a D–T plasma, using the second harmonic of tritium, has been demonstrated. First measurements of the confined alpha particles have been performed and found to be in good agreement with TRANSP [Nucl. Fusion 34, 1247 (1994)] simulations. Initial measurements of the alpha ash profile have been compared with simulations using particle transport coefficients from He gas puffing experiments. The loss of alpha particles to a detector at the bottom of the vessel is well described by the first-orbit loss mechanism. No loss due to alpha-particle-driven instabilities has yet been observed. D–T experiments on TFTR will continue to explore the assumptions of the ITER design and to examine some of the physics issues associated with an advanced tokamak reactor.

A "reference cell" for generating radio-frequency (rf) glow discharges in gases at a frequency of 13.56 MHz is described. The reference cell provides an experimental platform for comparing plasma measurements carried out in a common reactor geometry by different experimental groups, thereby enhancing the transfer of knowledge and insight gained in rf discharge studies. The results of performing ostensibly identical measurements on six of these cells in five different laboratories are analyzed and discussed. Measurements were made of plasma voltage and current characteristics for discharges in pure argon at specified values of applied voltages, gas pressures, and gas flow rates. Data are presented on relevant electrical quantities derived from Fourier analysis of the voltage and current wave forms. Amplitudes, phase shifts, self-bias voltages, and power dissipation were measured. Each of the cells was characterized in terms of its measured internal reactive components. Comparing results from different cells provides an indication of the degree of precision needed to define the electrical configuration and operating parameters in order to achieve identical performance at various laboratories. The results show, for example, that the external circuit, including the reactive components of the rf power source, can significantly influence the discharge. Results obtained in reference cells with identical rf power sources demonstrate that considerable progress has been made in developing a phenomenological understanding of the conditions needed to obtain reproducible discharge conditions in independent reference cells.

A gas phase and surface chemistry study of inductively coupled plasmas fed with C4F6/Ar and C4F8/Ar intended for SiO2 etching processes was performed. Adding Ar to those fluorocarbon gases results in a strong increase of the ion current, by up to a factor of 5 at 90% Ar relative to the pure fluorocarbon gases. The fluorocarbon deposition rate is higher for C4F6/Ar than for C4F8/Ar, whereas the fluorocarbon etching rate is lower, and both quantities decrease as the amount of Ar is increased. For both C4F6/Ar and C4F8/Ar, the CF2 density is more than an order of magnitude greater than the CF density. The CF2 partial pressure decreases as more Ar is added to the C4F6/Ar plasmas. A comparison of these data with corresponding results obtained with C4F8/Ar shows that the CF2 partial pressure in C4F6 is higher for Ar-lean gas mixture than for C4F8/Ar. This remains true up to 40% Ar. Above 40% Ar the CF2 partial pressure in C4F8 is higher than for C4F6. The CF and COF2 partial pressures in C4F8 are higher than for C4F6. The SiO2 etch rate is higher for C4F8/Ar than for C4F6/Ar. This may be attributed in part to the higher F/C ratio of the steady-state fluorocarbon film formed on SiO2 surfaces for C4F8/Ar which was determined by x-ray photoemission spectroscopy (XPS). The etching selectivity of SiO2 over resist and silicon is increased by the addition of Ar to the fluorocarbon gases. Overall, the SiO2/resist and SiO2/Si etching selectivity are higher for C4F6/Ar (i.e., 4 and 9, respectively) at 90% Ar than for C4F8/Ar (i.e., 2 and 5, respectively) at 90% Ar and otherwise identical conditions. Both ellipsometry and XPS measurements show that the steady-state fluorocarbon layer thickness is greater for C4F6/Ar (∼4 nm) than for C4F8/Ar (∼2.8 nm). Argon addition leads to a strong decrease of the fluorine content of the steady-state fluorocarbon layers on both Si and SiO2 surfaces relative to films produced in pure fluorocarbon discharges, and this effect is related to the increase of the SiO2/Si and SiO2/resist etching selectivity.

Electron-impact excitation cross sections for transitions between terms up to the n = 5 shell of neutral hydrogen have been calculated using the R-matrix method with pseudostates and compared with previous studies. Maxwell-averaged effective collision strengths have been prepared and used in population calculations to examine effective emission coefficients for diagnostic applications in fusion plasmas. Our results remove an uncertainty in the reaction rates of an important class of atomic processes governing H I emission in plasmas.