Silicon carbon nitride (SiCN) films were prepared on silicon substrate by reactive magnetron sputtering of a sintered silicon carbide target in a mixture of argon, nitrogen and acetylene. Detailed studies including energy dispersive spectrometer, atomic force microscope, X-ray diffraction, Fourier transformed infrared spectrometry and [Formula: see text]–[Formula: see text] measuring instrument were performed. The as-deposited SiCN films do not exhibit obvious crystalline phase, and the SiCN films annealed at 600[Formula: see text]C show SiC crystal and graphite carbon. The SiCN films mainly consist of Si–N, Si–C, Si–O, C–C, C[Formula: see text]N, Si–Hn and N–Hn bonds, and increasing C2H2 flow rate promotes the formation of C–C, N–Hn and Si–N bonds. The SiCN film with low dielectric constant of 3.8 and compact structure was successfully prepared.
Hydrogenated silicon carbonitride (SiCN:H) thin films were deposited by sputtering of silicon carbide target in hydrogen-doped argon and nitrogen atmospheres. The properties of the SiCN:H films were analyzed by scanning electron microscopy with energy dispersive spectrometer, atomic force microscope, Fourier transform infrared spectroscopy, X-ray diffraction and fluorescence spectrophotometer. No distinct crystal was formed in the SiCN:H films as-deposited and annealed at 600∘C and 800∘C. The SiCN:H films were mainly composed of Si–N, Si–C, Si–O, C–C, C–N, C[Formula: see text]N, N–Hn bonds and SiCxNy network structure. The strong blue photoluminescence observed from the SiCN:H film annealed at 600∘C was attributed to SiCxNy network structure.
Security is a basic need of system and it is one of core technology of remote controlled system. Robot monitoring system of ocean remote sensing satellite receiving station includes robot, cloud computing system and remote terminals. Robot acquires real-time image of controlled system and operates it; cloud computing system build visual decision subsystem to identify the target using wavelet transform algorithm, neural network algorithm and knowledge database of features video of specific environmental; using remote terminal administrator observes the controlled system through its scene simulator and control robot to operate it remotely. Using technology of the pseudo-random number password, technology of mutual authentication to prevent cloning site, technology of conversion between the image of controlled system and its status code and technology of conversion between operation codes and operation instructions, the security strength of the robot monitoring system is improved greatly.
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