A crystal-damage-free nanodoping method, which utilized the vacuum drive-in diffusion of Al into ZnO nanorods, was developed. In this method, vertical ZnO nanorod arrays that were grown by chemical bath deposition beforehand were deposited with Al thin film and subsequently heat-treated under a high vacuum. At an optimum condition, the surface Al atoms were completely diffused into ZnO nanorods, resulting in Al-doped ZnO nanorods. Stretchable gas sensors were fabricated by sequentially drop-casting the Al-doped ZnO nanorods and silver nanowires on polydimethylsiloxane substrate. The resistance and response of the sensor could be optimized through the elaborate control of relative densities of Al-doped ZnO nanorods and silver nanowires. The sensor showed a high response of 32.3% to 10 ppm of NO 2 gas at room temperature, even under a large strain of 30%. The NO 2 -sensing mechanism of Al-doped ZnO nanorod/silver nanowire bilayer sensors is discussed on the basis of a synergistic interplay of Al-doped ZnO nanorods and silver nanowires.

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