SUMMARYNanoantennas for double-band uncooled sensors are proposed for infrared focal plane arrays (FPA). Metal-oxide-metal tunnel diodes integrated with the nanoantennas are square-law detectors for currents induced in the antennas by incident infrared radiation. The sensors that operate in the long-wave infrared band are CMOS compatible and facilitate high-speed processing exceeding 1000 frames per second. Double-band sensors are proposed for each pixel of the FPA. The double-band character of the sensor's responsivity is insured by the design of the antenna geometry. The frequency dependence of the insulator material is taken into account. Simulations of the proposed design are promising.
This work is intended to describe the design aspects and to characterize the functionality of a novel thermopile structure applicable for detecting millimetre range and THz radiation. The proposed thermopile consists of a series of micromachined poly-crystalline silicon thermocouple strips arranged linearly. This device can act as a series of antennas; its antenna-like operation was demonstrated clearly by the strong polarization dependence when detecting microwave radiation. The sensing principle is similar to the basic operation of bolometers in that the absorbed radiation heats up the semiconductor strips, but the temperature increment is detected by the Seebeck effect instead of the resistance change. Therefore there is no readout current and the voltage output starts from zero. In the present work we are going to show the simulation of the current distribution. The fabrication of the device will also be outlined, as well as the results of measurements performed at 13, 100 GHz, and both in broad-band THz and in infrared radiation.
The modified micromachined thermopile consists of linearly arranged thermopairs instead of the usual loops. This device can act as a series of antennas and senses the millimeter wave radiation [1]. The antenna-like operation was demonstrated by the strong dependence on the polarization. The working principle is similar to the bolometers in that respect that the absorbed radiation heats up the semiconductor strips, but the temperature increment is sensed by the Seebeck effect instead of the resistance increment. Therefore there is no read-out current and the voltage output starts from zero. In the present work we are going to search absorption spectra of the device. It is shown that the resonance depends mainly on the dimensions and shape of the chip; the linear thermopiles are rather E-field probes. The fabrication of the device will be also outlined as well as the experimental results.
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