SUMMARY Results are reported concerning the use of an energy dispersive X‐ray detector to carry out the analysis of thin foils in the electron microscope. The combination of a thin specimen and the extreme stability of the energy dispersive X‐ray detector enables the experimental determination of a calibration curve of X‐ray production—detection efficiency vs characteristic X‐ray energy. Quantitative analysis can be carried out using the calibration curve without reference to standards at the time of analysis.

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