Recent advances in the glow discharge optical spectroscopy (GDOS) technique have been made, as shown by measurements of implanted arsenic profiles in silicon. The improvements discussed include the use of krypton as a discharge gas, a dual detection system which permits simultaneous measurements of the impurity distribution and the substrate sputtering, and the use of nickel as an overcoat to allow accurate measurements near the surface. Profiles of as-implanted and 1000°C annealed samples are presented which agree substantially with other types of measurements.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.