Study of an α-Al2O3 single crystal by electron-induced x-ray emission spectroscopy and cathodoluminescence is reported. The relative intensities of optical emissions due to F+ and F centers have been determined as a function of the parameters of the electron beam and the annealing of the sample. It is shown that the F+ centers, i.e., the oxygen vacancies with one trapped electron, are predominant when the density of the incident electron beam increases. Similar variation is observed when the electron energy varies from 1 to 4 keV. From the comparison between x-ray and optical spectra, the F+ centers are determined to be stable defects in the bulk of the sample.
Line shapes of atomic lines and soft x-ray emission bands measured with a wavelength dispersive spectrometer (WDS) with the Electron Probe Micro Analyzer (EPMA) are reviewed. Least square fitting to pseudo-Voigt profiles of the digitally measured spectra are used to account for the presence of non-diagram features (high and low energy satellites) and instrumental induced distortions. The effect of line width and relative intensities on the quality of fits is illustrated. Spectral distortions resulting from the presence of absorption edges within the analyzed wavelength region are illustrated for the case of FeLα,β emission bands for pure Fe and iron oxides. For quantitative analysis, an analytical approach is presented where the measured soft x-ray emission bands are corrected for self absorption before extracting the intensities from the experimental data.
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