We present the methodology used to fabricate an X-ray reflection grating and describe a technique for grating replication. Further, we present the experimental procedure and results of a study to measure the diffraction efficiency of a replicated X-ray reflection grating in an extreme off-plane geometry. The blazed grating demonstrates a total diffraction efficiency of ∼60% from 0.34 to 1.2 keV at a grazing angle of ∼1.°5, with single-order efficiency ranging from ∼35% to 65% for energies within the blaze envelope. The diffraction efficiency of the grating measured relative to the reflectivity of the metal coating averages ∼90% above 0.34 keV. Data collected as a function of beam position on the grating indicate a relative variation in total efficiency of <1% rms across the grating surface.
The co-integration of piezoelectric actuation and sensing capabilities on !+" microelectromechanical system-based resonators can be a source of electrical cross-talk that, if not !!" properly taken into account, may dramatically affect the interpretation of the device's output. In this !#" paper, we identify three parasitic electrical effects pertaining to the most commonly used piezoelectric !$" actuation and sensing schemes. To further investigate the impact of such parasitic effects, !%" microcantilevers, bridges and membranes integrating a layer of sol-gel lead zirconate titanate (PZT) !&" were fabricated and electrically characterized. Experimental results on the resonant characteristics !'" were compared with simulations of the studied resonators' equivalent electrical models. Methods for !(" reducing the design-dependent parasitic electrical effects such as mutual capacitances of less than !)" 10fF, electrical wiring or static capacitance mismatches of less than 20% of the integrated !*" piezoelectric films are discussed. #+" #!" ##" The on-chip actuation and sensing schemes studied in this paper along with the use of dedicated %)" electronics developed for this purpose aim to answer these questions. A series of design rules for %*" piezoelectric materials integration is proposed from the standpoint of MEMS-based resonator &+" development.
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