An apblication of supervisory control theory to a semiconductor manufacturing piece of equipment is presented. This approach allows the flexible design and reliable update of processing "retipes" to accommodate frequently changing manufacturing requirements. An input-output interpretation of supervisory control theory is given. This interpretation leads to a generic implenientation scheme for manufacturing systems. A synthesis fixpoint algorithm implementation using binary decision diagrams enables the design of supervisors of realistic size. A sample synthesis for an oxide growth recipe is performed on a state space of the order of lo6 states. The actual implementation of the logk sequencing control software for the application under investigation is described.study on how to apply supervisory control to the management of manufacturing workcells [41. Other related work includes the automatic verification of controllers, instead of their automatic synthesis. Here, the supervisor design is performed on a trial and error basis. Verification can be done using techniques originally developed for the formal verification of logic circuits, protocols, and logic programs [51-[7]. Recently, modelchecking verification approaches have been applied to the verification of supervisors for an automated highway car platoon system [81.

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