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Surface crater defects in HgCdTe epilayers grown by molecular-beam epitaxy have been investigated using cross-sectional scanning and transmission electron microscopy, as well as atomic force microscopy. These defects originated primarily within the HgCdTe films, and were shown to be associated with the local development of polycrystalline morphology. High-resolution observations established the occurrence of finely spaced HgCdTe/Te intergrowths with either semicoherent or incoherent grain boundaries, as well as small HgCdTe inclusions embedded within Te grains.

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