Nanophotonic waveguides and components are promising for use in the large-scale integration of photonic circuits. Coupling light between nanophotonic waveguides and a single-mode fiber is an important problem and many different solutions have been proposed and demonstrated in recent years. In this paper, we discuss a grating coupler approach. Grating couplers can be placed anywhere on a circuit and can easily be integrated. We have experimentally demonstrated >30% coupling efficiency with a 1 dB bandwidth of 40 nm on standard wafers. Theoretically, the coupling efficiency can be improved to >90% using an optimized grating design and layer stack. The fabrication of the couplers in silicon-on-insulator and in indium phosphide membranes is also discussed.

Abstract-We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplers.

Abstract-We report experimental results on compact and broadband focusing grating couplers, both in silicon-on-insulator (SOI) and gold on SOI. An eight-fold length reduction of the coupling structure from fiber to photonic wire in SOI, as compared to a linear grating and adiabatic taper, is obtained, without performance penalty. A proof of principle is given for a focusing grating coupler in gold on SOI, with 20% fiber-to-focus efficiency.

Abstract-We report on compact focusing polarization diversity grating couplers in silicon-on-insulator, which can be used to overcome the polarization dependence of nanophotonic integrated circuits. The minimum fiber-to-fiber polarization dependent loss is 0.4 dB and the focusing grating couplers are as performant as standard 2-D-grating couplers without focusing. In addition, the focusing property of the gratings results in an 8-fold length reduction of the coupling structure as compared to standard nonfocusing 2-D-grating versions.

Abstract-We have designed and fabricated an efficient grating coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88-nm-wide slits, etched at an angle of 58 to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%.