A newly designed bulge-testing apparatus for the mechanical testing of the tensile properties of free-standing thin films has been constructed and tested. With this instrument it is possible to measure the elastic modulus, tensile and compressive growth stress, and plain strain yield strength in thin films. The setup features a high strain resolution (4E-10), and a high stress resolution, e.g., >0.2 MPa for bulge heights larger than 10 μm. In our setup, thin films are stressed by a differential gas pressure across the film, while the deflection is measured by a scanning laser beam. The scanning laser beam measures the curvature of the bulge rather than the bulge height. This makes the setup insensitive to a possible initial nonflatness of the film. This also provides the possibility to measure the growth stress of films that were deposited under a compressive stress. We show the results of measurements of the plane strain modulus on thin tungsten films and on both flat and nonflat aluminum (alloy) film samples.
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Citation for published version (APA):Dam, van, C., Spiekman, L. H., Ham, van, F. P. G. M., Groen, F. H., Tol, van der, J. J. G. M., Moerman, I., ... Smit, M. K. (1996). Novel compact polarization converters based on ultra short bends. IEEE Photonics Technology Letters, 8(10), 1346-1348.
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Abstract-The first integrated InP-based polarization independent optical crossconnect is reported. The device can crossconnect signals at four wavelengths independently from two input fibers to two output fibers. Total on-chip loss is less then 16 dB. Device size is 7 2 9 mm 2 .
Curved waveguides with strong lateral modal confinement have been fabricated on InGaAsP/InP by etching through the waveguide core. This has resulted in extremely sharp bends (radii as small as 30 Im) with negligible bend loss, enabling fabrication of very low loss 90" turns on a chip area as small as that of a corner mirror.
Abstract-An improved technology for realizing high-quality PHASAR's is reported, which is compatible with the integration of electrooptical switches for use in add-drop multiplexers. This technology is demonstrated in a 16-channel polarization independent low loss (<2.4 dB on-chip) PHASAR.
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