Sb2S3 thin films have been obtained by physical vapour deposition on LiNbO3 and glass substrates. Films with amorphous structure originally became polycrystalline by annealing in a sulfur atmosphere. Changes in optical and structural properties have been studied as a function of annealing temperature. A drastic variation in optical transmission, energy gaps, refractive index, crystallite size, etc is observed at a temperature near 200 °C.

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Multilayers of MgF2 and Sb2S3 have been obtained by physical vapour deposition on glass substrates. Changes in the optical and structural properties have been studied as a function of annealing temperature and the number of layers. A drastic variation in optical transmission, microstrain and grain size is observed at a temperature near 225 °C. A comparison of the material properties of multilayers and a monolayer is carried out.

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