Hydraulic actuators play an important role in various industries. In the last decades, to improve system performance, some advanced control methods have been developed. Backstepping control, which can deal with the system nonlinearities, is widely used in hydraulic system motion control. This paper focuses on the high-frequency position servo control of hydraulic systems with proportional valves. In backstepping controllers, valve dynamics are usually ignored due to difficulty of controller implementation. In this paper, valve dynamics of the proportional valve were decoupled into phase delay and amplitude delay. The valve dynamics are compensated without increasing the system order. The phase delay is compensated by desired engine valve lifts transformation. For amplitude delay, the paper proposes a compensation strategy based on the integral flow error. By introducing the feedback of the integral flow error to the backstepping controller, the system has faster dynamic responses. Besides, the controller also synthesized proportional valve dead-zone and system uncertainties. The comparative experiment results show that the controller with integral flow compensation can improve engine valve lift tracking precision both in steady and transient conditions.
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