Carbon-based micro-supercapacitors dedicated to energy storage in self-powered modules were fabricated with inkjet printing technology on silicon substrate. An ink was first prepared by mixing an activated carbon powder with a PTFE polymer binder in ethylene glycol stabilized with a surfactant then deposited by inkjet on patterned gold current collectors with the substrate heated at 140 • C in order to assure a good homogeneity. Electrochemical micro-capacitors with electrodes in an interdigital configuration were fabricated, and characterized using electrochemical techniques in 1 M Et 4 NBF 4 propylene carbonate electrolyte. These micro-devices show an excellent capacitive behavior over a wide potential range of 2.5 V for a cell capacitance of 2.1 mF cm −2. The newly developed technology will allow the integration of the storage device as close as possible to the MEMS-based energy harvesting device, minimizing power losses through connections.

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