Doped Si-based glasses such as boron silicate glass have a variety of applications in photovoltaics. A well suited, fast method for analysing the elemental composition of these layers is glow discharge optical emission spectroscopy. In addition to qualitative depth profiling, quantitative analysis is of special interest. This requires a calibration in the relevant concentration range, which cannot be achieved by certified commercial standards and therefore requires laboratory standards. In context of calibration, the influence of the substrate surface on the depth profile is investigated. It is found that calibration is not unambiguously possible with a rough surface. Optical effects can be identified and a layer system consisting of a SiN x :H interface layer is used, which was optimized by simulating reflection on interfaces using the transfer matrix method so that calibration is possible using such laboratory standards.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.