A b s t r a c t -The effect of Tanneal on Fe-Ta-Cr-N thin films has been studied. Crystallization of Fe was found to precede TaN. Results showed that Tanneal controls not only the grain size but also the amount of Ta and N which is in solution within the Fe matrix and the magnetic properties was determined largely by these two factors. In addition, TaN was found to nucleate both homogeneously and heterogeneously, according to the K-S OR, with respect to the Fe grain.
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