We report the realization of very small area resonant tunneling diodes (RTD's) for integrated microwave applications. Diodes with areas down to 3×3 μm2 were fabricated with the necessary coplanar lines for microwave wafer probing. Peak to valley ratios up to 3.5 with peak current densities ranging from 0.6 A/cm2 to 1.5 kA/cm2 have been achieved for Al0.4Ga0.6 As/GaAS double barrier heterostructures grown by MBE on Semi-Insulating substractes. Reflection gain versus frequency measurements in the 1.5-26.5 GHz range, at room temperature, were performed. The smaller devices exhibit a maximum cut off frequency for the negative differential resistance of 18 GHz. For high current versions, we expect significant increase in frequency limit
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