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Abstract.We have built and operated a novel setup for the characterization and identification of gases or vapors based on sequential position readout via a beam-deflection technique from a microfabricated array of eight cantilever-type sensors. Each of the cantilevers can be coated on one side with a different sensor material to detect specific chemical interactions. We demonstrate that disturbances from vibrations and turbulent gas flow can be effectively removed in array sensors by taking difference signals with reference cantilevers. For example, H 2 can be detected by its adsorption on a Pt-coated sensor because a change in surface stress causes a static bending of the sensor. The diffusion of various alcohols into polymethylmethacrylate induces resonance frequency shifts in a dynamic measuring mode and bending in the static mode, which allows one to distinguish between the various alcohols.Sensor devices for detection of gases and vapors via specific coatings are gradually gaining importance in chemistry, materials science, and biochemistry owing to the increasing demand for detection of analytes at monolayer coverage.

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