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A Meta-Nano Channel BioFET is demonstrated to decouple the electrostatics of the solution from the electrodynamics of the FET such that the Debye screening length can be electrostatically tuned to enhance the sensor output signal.

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The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/aelm.202200399.

Abstract:In this paper, we report on ultra-low power consuming single poly floating gate direct radiation sensors. The developed devices are intended for total ionizing dose (TID) measurements and fabricated in a standard CMOS process flow. Sensor design and operation is discussed in detail. Original array sensors were suggested and fabricated that allowed high statistical significance of the radiation measurements and radiation imaging functions. Single sensors and array sensors were analyzed in combination with the specially developed test structures. This allowed insight into the physics of sensor operations and exclusion of the phenomena related to material degradation under irradiation in the interpretation of the measurement results. Response of the developed sensors to various sources of ionizing radiation (Gamma, X-ray, UV, energetic ions) was investigated. The optimal design of sensor for implementation in dosimetry systems was suggested. The roadmap for future improvement of sensor performance is suggested.