In this paper, the temperature-dependent dielectric properties of vanadium-sesquioxide-based thin films are studied to assess their suitability for thermally tunable filters at optical communication wavelengths. Spectroscopic ellipsometry is utilized to measure the optical constants of vanadium oxide thin films at temperatures ranging from 25 °C to 65 °C. High thermo-optic coefficients (dn/dTs) were observed. The highest dn/dTs, measured at approximately 40 °C, were −8.4 × 10−3/°C and −1.05 × 10−2/°C at 1550 nm and 2000 nm, respectively.
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