The importance of high intensity few- to single-cycle laser pulses for applications such as intense isolated attosecond pulse generation is constantly growing, and with the breakdown of the monochromatic approximation in field ionization models, the few-cycle pulse (FCP) interaction with solids near the damage threshold has ushered a new paradigm of nonperturbative light–matter interaction. In this Letter, we systematically study and contrast how femtosecond laser-induced damage and ablation behaviors of S i O 2 / H f O 2 -based reflective multilayer dielectric thin film systems vary between FCP and 110 fs pulses. With time-resolved surface microscopy and ex situ analysis, we show that there are distinct differences in the interaction depending on the pulse duration, specifically in the “blister” morphology formation at lower fluences (damage) as well as in the dynamics of debris formation at higher fluences (ablation).
Reduction of Brownian thermal noise due to mechanical loss in high-reflectivity mirror coatings is critical for improving the sensitivity of future gravitational wave detectors. In these mirrors, the mechanical loss at room temperature is dominated by the high refractive index component, amorphous tantala (Ta 2 O 5) or tantala doped with titania (Ti∶Ta 2 O 5). Toward the goal of identifying mechanisms that could alter mechanical loss, this work investigates the use of assist ion bombardment in the reactive ion beam sputtering deposition of tantala single layers. Low-energy assist ion bombardment can enhance adatom diffusion. Low-energy assist Ar þ and Xe þ ion bombardment at different conditions was implemented during deposition to identify trends in the mechanical loss with ion mass, ion energy, and ion dose. It is shown that the atomic structure and bonding states of the tantala thin films are not significantly modified by low-energy assist ion bombardment. The coatings mechanical loss remains unaltered by ion bombardment within errors. Based on an analysis of surface diffusivity, it is shown that the dominant deposition of tantala clusters and limited surface diffusion length of oxygen atoms constrain structural changes in the tantala films. A slower deposition rate coupled with a significant increase in the dose of the low-energy assist ions may provide more favorable conditions to improve adatom diffusivity.
Amorphous tantala ( T a 2 O 5 ) thin films were deposited by reactive ion beam sputtering with simultaneous low energy assist A r + or A r + / O 2 + bombardment. Under the conditions of the experiment, the as-deposited thin films are amorphous and stoichiometric. The refractive index and optical band gap of thin films remain unchanged by ion bombardment. Around 20% improvement in room temperature mechanical loss and 60% decrease in absorption loss are found in samples bombarded with 100-eV A r + . A detrimental influence from low energy O 2 + bombardment on absorption loss and mechanical loss is observed. Low energy A r + bombardment removes excess oxygen point defects, while O 2 + bombardment introduces defects into the tantala films.
High mechanical stress can affect the performance of multilayer thin film optical coatings, causing wavefront aberrations. This is particularly important if the multilayer stack is deposited onto thin substrates, such as those used in adaptive optics. Stress in thin film coatings is dependent on the deposition process, and ion beam sputtering (IBS) thin films are known to have high compressive stress. In the present work, we show that stress in IBS S i O 2 thin films can be reduced from 490 MPa to 48 MPa using high-energy O 2 assist ion bombardment during deposition while maintaining high optical quality. A comparison of the reduction of stress in S i O 2 deposited from oxide and metal targets is provided.
We report results of a study of the laser induced damage threshold (LIDT) behavior of ion beam sputtered H f O 2 / S i O 2 multilayer coatings on Yb:YAG using 1-on-1 and N-on-1 test protocols. The tests were conducted at ambient, vacuum, and cryogenic conditions using 280 ps pulses at λ = 1030 n m . The 1-on-1 LIDT of antireflection (AR) stacks is found to be only slightly reduced under vacuum and cryogenic conditions, while that of high reflectivity (HR) stacks is insensitive to environmental conditions within the uncertainty of the measurements. Cryogenic N-on-1 tests show the LIDT of the HR coating is almost the same as in the 1-on-1 tests. Conversely, the cryogenic N-on-1 test of the AR coating shows damage at ∼ 13 J / c m 2 , a fluence lower than the 20.4 J / c m 2 of 1-on-1 tests. The AR damage behavior is found to be affected by imperfections at the Yb:YAG surface. These findings show that high surface quality is required to increase energy extraction from active mirror laser amplifiers.
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