In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.

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In this work, we present the results of the opto–electro–mechanical characterization of tunable micro-lenses, Tlens®, performed with a single-spot optical measuring system. Tested devices are composed of a transparent soft polymer layer that is deposited on a supporting glass substrate and is covered by a glass membrane with a thin-film piezoelectric actuator on top. Near-infrared optical low-coherence reflectometry is exploited for both static and low-frequency dynamic analyses in the time domain. Optical thickness of the layers and of the overall structure, actuation efficiency, and hysteretic behavior of the piezo-actuator as a function of driving voltage are obtained by processing the back-reflected signal in different ways. The use of optical sources with relatively short coherence lengths allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces, furthermore, selecting the plane/layer to be monitored. We finally report results of direct measurements of Tlens® optical power as a function of driving voltage, performed by redirecting a He-Ne laser beam on the lens and monitoring the focused spot at various distances with a digital camera.