Keywords : atmospheric pressure glow discharge plasma, nitrogen gas, oxygen gas, fluid model, optical emission spectroscopy Application of atmospheric pressure glow discharge (APGD) plasmas to materials processing such as surface treatment and chemical vapor deposition (CVD) is very atStractive, since the APGD plasmas have a potential of high treatment rate and require no vacuum systems. Nitrogen gas has been used as discharge gas due to low cost compared to other discharge gases. The discharge gas is often admixed with oxygen in order to obtain oxygen atom which is reactive radical.In the present study, a one-dimensional model for the APGD plasmas in the nitrogen-oxygen mixtures is constructed. The investigation of the influence of the oxygen admixture to the excited nitrogen molecules and oxygen atoms at a frequency 100 kHz is performed. Optical emission spectroscopy (OES) measurements are performed to evaluate the validity of the model.The model is based on the one-dimensional particle continuity equations coupled with Poisson's equation and on the gas phase reactions which consist of the electron-neutral, ion-neutral and neutral-neutral collisions. The basic assumptions in the present study are as follows:(1) A one-dimensional parallel-plate electrode configuration is considered. (2) The electron flux and ion flux are described by a drift-diffusion approximation. (3) The effect of gas flow is omitted. (4) The electron energy equation had a serious drawback for the present calculation since solution of the equation failed to converge, and therefore electron energy conservation equations is omitted. (5) Ion energy conservation equations is omitted. The ion energy is assumed to be 0.026 eV. (6) The electron mobility, diffusion coefficient and reaction rate coefficient were determined from numerical analysis of the Boltzmann equation as a function of the local electric field. − , four metastable sate species, N 2 (, O 2 (a 1 ∆ g ) and three radiative state species N 2 (B 3 Π g ), N 2 (C 3 Π u ), NO(A 2 Σ + ) are taken into account.APGD plasma is obtained between two plane electrodes covered by dielectric barrier. Amplitude of applied sinusoidal voltage is 5 kV and frequency is 100 kHz. The optical spectrometer is a monochromator equipped with 600 lines mm −1 gratings and coupled to a 2048-element linear silicon CCD array. Figure 1 shows calculated N 2 (C 3 Π u ) density (solid line) and optical emission intensity of N 2 SPS by OES (full circles) as a function of the concentration of oxygen admixture. Both the calculated density and the measured optical emission intensity decrease steeply with increasing oxygen admixture. Figure 2 shows calculated NO(A 2 Σ + ) density (solid line) and optical emission intensity of NO-γ system by the OES (full circles) as a function of the concentration of oxygen admixture. In contrast to Fig.1, the emission intensity of NO first peaks at around 0.2 % of oxygen admixture and then decreases. Both the calculated density and the measured emission intensity of NO have a peak around 0.2...
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