Selective-area atomic layer deposition (ALD) was studied using poly(vinyl pyrrolidone) (PVP) films as growth-preventing mask layers. The PVP films were prepared by spin coating and patterned by UV lithography. The PVP films were tested in several ALD processes: iridium, platinum, ruthenium,
Al2normalO3
, and
ZrO2
. The deposition temperatures were
250–300°C
. In general, the PVP film passivated the surface against the noble metal processes, but the oxide films grew on PVP. However, the oxide films did not grow through the PVP film on the substrate surface and, therefore, the films could still be patterned, though with more of a lift-off method rather than with pure selective-area ALD.
A versatile synthesis procedure for composite nanofibers, combining electrospinning and atomic layer deposition (ALD), is presented. Both solid core/sheath nanofibers and nanoparticle loaded nanotubes can be made, depending on the order of calcination of the electrospun fiber and the ALD process. Magnetic and photocatalytic nanofibers prepared this way can be recycled readily by collecting with a magnet.
ore WO 3 nanofibers (140-300 nm in diameter, several hundred mm long) are made by a novel, water-based electrospinning process using ammonium metatungstate (AMT) and polyvinylpyrrolidone (PVP) as precursors. TiO 2 shells (1.5-20 nm) are grown by atomic layer deposition (ALD) using TiCl 4 and water at 2508C. The WO 3 /TiO 2 composite fibers are analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM)-energy dispersive X-ray (EDX), transmission electron microscopy (TEM), Raman spectroscopy (RS), UV-Vis spectroscopy, and X-ray photoelectron spectroscopy (XPS). The optimal photocatalytic conversion under visible light is reached by the WO 3 /1.5 nm TiO 2 nanofibers, which have higher activity compared to bare WO 3 and Degussa TiO 2 . Thicker TiO 2 layers fill the pores of the nanowires and reduce the specific surface area, weakening the photocatalytic activity.
A needleless electrospinning setup named 'Needleless Twisted Wire Electrospinning' was developed. The polymer solution is electrospun from the surface of a twisted wire set to a high voltage and collected on a cylindrical collector around the wire. Multiple Taylor cones are simultaneously self-formed on the downward flowing solution. The system is robust and simple with no moving parts aside from the syringe pump used to transport the solution to the top of the wire. The structure and process parameters of the setup and the results on the preparation of polyvinyl pyrrolidone (PVP), hydroxyapatite (HA) and bioglass fibers with the setup are presented. PVP fiber sheets with areas of 40 × 120 cm(2) and masses up to 1.15 g were prepared. High production rates of 5.23 g h(-1) and 1.40 g h(-1) were achieved for PVP and HA respectively. The major limiting factor of the setup is drying of the polymer solution on the wire during the electrospinning process which will eventually force to interrupt the process for cleaning of the wire. Possible solutions to this problem and other ways to develop the setup are discussed. The presented system provides a simple way to increase the production rate and area of fiber sheet as compared with the conventional needle electrospinning.
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