Most of the Fenitride phases have been studied in much detail. Nevertheless, there is still a debate about the most ecient, exact and controlled way of obtaining thin lms of the desired iron nitride phases. Thin lms of iron nitrides were deposited by Molecular Beam Epitaxy in Ultra High Vacuum. By changing the growth parameters we tried to obtain the α -phase in its purest form. We worked also on iron mononitride, FeN (γ -FeN) which is known to exist in dierent phases. The stoichiometry of the samples was determined by means of resonant Rutherford Backscattering Spectroscopy. The samples were studied by room temperature Conversion Electron Mössbauer Spectroscopy. We achieved as much as 24% of pure α -phase and provide evidence of the existence of γ -FeN with vacancies and of the transformation of nonmagnetic γ -phase into magnetic ε-phase after time exposure.
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