The energy distribution and angular dependence of secondary electrons generated by the impact of 100–2000-eV electrons on He, N2, and O2 and by the impact of 500-eV electrons on Ne, Ar, Kr, Xe, H2, NO, CO, H2O, NH3, CH4, C2H2, and CO2 have been measured over the 4–200-eV range. The measurements were made in a crossed-beam apparatus with the use of a fixed hemispherical electrostatic analyzer and a rotatable electron gun. The observed spectra were integrated over angle to obtain relative cross sections for secondary-electron production. It was found that the shapes of the spectra of all the gases (except Ar, Kr, and Xe, which contain intense electron emission features in this energy range) were smooth and qualitatively similar, approaching a constant cross section at low secondary energies, and falling off at high secondary energies slightly faster than Es−2, where E8 was the energy of the secondary. The shape of the spectrum was found to be nearly independent of primary energy in He, O2, and N2.

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