Terahertz (THz) nanogap structures have emerged as versatile platforms for THz science and applications by virtue of their strong in-gap field enhancements and accompanying high levels of sensitivity to gap environments. However, despite their potential, reliable fabrication methods by which to create THz structures with sub-10 nm gaps remain limited. In this work, we fabricated THz split-ring resonator (SRR) arrays featuring a sub-10 nm split gap. Our fabrication method, involving photolithography, argon ion milling, and atomic layer deposition, is a high-throughput technique that is also applicable to the fabrication of other THz structures with sub-10 nm gaps. Through THz-time domain spectroscopy and a numerical simulation, we identified the fundamental magnetic resonances of the nanogap SRRs, at which the electric field enhancement factor is experimentally estimated to be around 7000. This substantial field enhancement makes SRRs with a sub-10 nm gap suitable for the study of high-field phenomena and related applications.

One of the most straightforward methods to actively control optical functionalities of metamaterials is to apply mechanical strain deforming the geometries. These deformations, however, leave symmetries and topologies largely intact, limiting the multifunctional horizon. Here, we present topology manipulation of metamaterials fabricated on flexible substrates by mechanically closing/opening embedded nanotrenches of various geometries. When an inner bending is applied on the substrate, the nanotrench closes and the accompanying topological change results in abrupt switching of metamaterial functionalities such as resonance, chirality, and polarization selectivity. Closable nanotrenches can be embedded in metamaterials of broadband spectrum, ranging from visible to microwave. The 99.9% extinction performance is robust, enduring more than a thousand bending cycles. Our work provides a wafer-scale platform for active quantum plasmonics and photonic application of subnanometer phenomena.

Strong demand for plasmonic devices with an enormously enhanced electric field and desired resonance frequencies has led to extensive investigations of metallic slot structures. While strong field enhancement can be achieved by reducing the width of the slot, the effect of the gap surface plasmon limits the maximum achievable field enhancement at higher frequencies. Specifically, the effect of the gap surface plasmon becomes stronger as the gap width decreases and strongly suppresses the transmission while causing a red-shift of the resonance. Here, we overcome these issues and realize strong field enhancements at higher frequencies, by managing the metal thickness of the nanoslots. We show that, as the nanoslots become as thin as 10 nm, they show a giant electric field enhancement of up to 7600. Moreover, the resonances are strongly blue-shifted to above 1 THz from 0.33 THz. Our work provides a novel route to achieving high field enhancements at desired frequencies, as well as a means by which to characterize the slot as the gap-sensitive or substrate-sensitive type.

Slot-type nanogaps have been widely utilized in transmission geometry because of their advantages of exclusive light funneling and exact quantification of near-field enhancement at the gap. For further application of the nanogaps in electromagnetic interactions with various target materials, complementary studies on both transmission and reflection properties of the nanogaps are necessary. Here, we observe an anomalous extinction of terahertz waves interacting with rectangular ring-shaped sub-30 nm wide gaps. Substrate works as an index matching layer for the nanogaps, leading to a stronger field enhancement and increased nonlinearity at the gap under substrate-side illumination. This effect is expressed in reflection as a larger dip at the resonance, caused by destructive interference of the diffracted field from the gap with the reflected beam from the metal. The resulting extinction at the resonance is larger than 60% of the incident power, even without any absorbing material in the whole nanogap structure. The extinction even decreases in the presence of an absorbing medium on top of the nanogaps, suggesting that transmission and reflection from nanogaps might not necessarily represent the absorption of the whole structure.

A novel plasmonic interferometric sensor intended for application to biochemical sensing has been investigated experimentally and theoretically. The sensor was included a slit surrounded by rectangular grooves using a thick gold film. A three-dimensional finite difference time-domain commercial software package was applied to simulate the structure. The Focused ion beam milling has been used as a mean to fabricate series of rectangular plasmonic interferometer with varying slit-groove distance L. Oscillation behavior is shown by transmission spectra in a broadband wavelength range between 400 nm and 800 nm in the distance between slit and grooves. Red-shifted interference spectrum is the result of increasing refractive indices. The proposed structure is functional from visible to near-infrared wavelength range and yields a sensitivity of 4923 nm/RIU and a figure of merit as high as 214 at 729 nm wavelength. In conclusion, this study indicates the possibility of fabricating a low cost, compact, and real-time high-throughput plasmonic interferometer.