We explore the miniaturization edge of soft nanoimprint molds, and demonstrate their feasibility to ultra-high resolution patterning of polymer films on planar and curved substrates, as well as of chalcogenide glasses.
Scalable surface patterning of chalcogenide glasses is the crux for many optical applications of these promising optical materials. Here, a novel, resist‐free surface patterning of chalcogenide glasses with 3D relief microstructures is introduced, using direct radiation‐assisted thermal imprint. The imprint is based on a nanocomposite mold made of a carbon nanotube matrix and polydimethylsiloxane resin. To allow nanoimprint, the mold and glass substrate are confined between two elastic membranes, pneumatically pressed against each other, and controllably radiated by an infrared bulb. Since chalcogenide glass is transparent to infrared radiation, the radiation is mostly absorbed in the mold due to the embedded carbon nanotubes, so that the glass–mold interface is heated to the imprint temperature. By using this approach, the first of its type direct imprint of chalcogenide glass of any arbitrary form is demonstrated, including flat substrates and convex aspheric lenses. The composition and structure of imprinted chalcogenide glass are analyzed, and it is demonstrated that they are well maintained throughout the imprint. It is optically characterized both in transmission and reflection modes. It is believed that the innovation provides a quantum leap in the micro‐ and nano‐scale processing of chalcogenide glasses, and opens the pathway to their numerous applications.
The authors explored an approach for nanostructuring of surfaces of chalcogenide glasses by direct soft nanoimprint lithography. The authors produced soft nanoimprint molds with microsized and nanosized relief features using polydimethylsiloxane. To enable the direct replication of the mold pattern on the surface of bulk chalcogenide glasses, the authors engineered a thermal imprint tool that prevents the substrate deformation using a physical confinement. The authors optimized the imprint process parameters to achieve an unprecedented full transfer micropattern onto a bulk chalcogenide glass. Furthermore, the authors explored pattern replication of nanosized structures by thermal imprint. This process paves the way for a facile and cost-effective fabrication of nanostructures on chalcogenide glasses and their numerous applications in optical and photonic devices.
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