In recent decades, various single-phase drive ultrasonic motors have emerged, and only a single excitation signal is used in their working states. Single-phase driven ultrasonic motors have the benefits of most ultrasonic motors, as well as the advantages of a simple driving circuit construction, low cost, high design flexibility, and high reliability, among others. According to the working principles, they are divided into three types: the vibration mode alternating type, the vibration mode coupling type, the vibration mode converting type. This paper summarizes various types of single-phase ultrasonic motors. The three types of the working principles and its representative structures are explained; output performances of the single-phase ultrasonic motors are described; then, practical and potential applications of the single-phase ultrasonic motors are introduced; finally, the research of single-phase ultrasonic motors are reviewed, and its development prospect is prospected. This review is helpful for a comprehensive understanding of single-phase drive ultrasonic motors. This paper offers the groundwork for the development of a novel single-phase driven ultrasonic motor with improved mechanical output.
With the development of science and technology, the performance requirements of micro-gripper are getting higher and higher. Therefore, this paper designs a new piezoelectric-driven micro-gripper with large and adjustable output displacement, which can adjust the output range and compensate the errors caused by flexible mechanism. By adjusting the output displacement, the micro-components of different sizes can be clamped. The three-stage amplification mechanism is adopted, which utilizes triangle and lever amplification. Using the pseudo-rigid body method, the flexible hinge is analyzed; the statics, kinematics and dynamics models are established. Through finite element method, the magnification ratio of the micro-gripper is obtained, then the structure of the micro-gripper is further optimized. The output displacement and the magnification of the single-arm of the micro-gripper under 135 V are 223.8 μm and 24.2 times, respectively. This paper provides a basis for the wide application of micro-gripper.
Most of ultrasonic motors (USMs) using non-isomorphic hybrid modes have resonance deviation which are easy to produce frequency decoupling, and conventional USMs can only drive rotor once in a working cycle. To overcome these problems, a surface-bonded type of U-shaped USM is proposed in this paper. At the same frequency, three isomorphic fourth-order bending vibration modes can be excited simultaneously and the resonance deviation between modes is eliminated, thus reducing the effect of frequency decoupling. In addition, a fourth-order bending vibration mode on horizontal beam of the U-shaped structure is used to provide pressing force at driving feet, and bending vibration modes on two vertical beams generate driving forces. Under the excitation of orthogonal signals, alternately driven elliptical trajectories are generated at driving feet. Besides, the surface-bonded type USM is more convenient to realize miniaturization and flexible structure. The USM is analyzed by using finite element method. The prototype is fabricated to evaluate performance of the USM. The experimental results show that velocity of the USM is 89.03 mm/s when excitation voltage is 180 VP-P and frequency is 86 kHz. The feasibility of working principle is proved by the experimental results.
Inspired by the Lissajous curve, a longitudinal-bending hybrid sandwich type ultrasonic actuator is proposed in this paper. Different from the traditional elliptical and linear driven trajectory, an “8” shaped Lissajous curve is used as a driven trajectory through the composition of longitudinal and bending vibration modes. The excitation signal of the ultrasonic actuator is formed by the superposition of two sinusoidal signals; thus, only a single channel driver is needed. The frequency ratio and the phase difference of the two sinusoidal signals are 2:1 and 0°, respectively. And, piezoelectric elements are sandwiched between the metal parts to excite the longitudinal and bending vibration modes. The working principle and design process of the proposed sandwich type ultrasonic actuator are presented. The desired longitudinal and bending vibration modes of the ultrasonic actuator are obtained by the finite element method. Then, the prototype is manufactured. The output performance is evaluated by experiments. The output velocity of the actuator can reach 59.70 rpm under an excitation voltage of 300 VP-P. This work provides a new sandwich type ultrasonic actuator based on the “8” shaped Lissajous driven trajectory by utilizing only one channel driver.
The inchworm piezoelectric actuator has a wide application prospect in the field of precision instruments. However, in view of the complex structure of the existing inchworm piezoelectric actuator and the far distance between the driving feet of the actuator, it is difficult to realize alternate driving and the high output speed of the driving feet, etc. In this paper, an inchworm piezoelectric linear actuator based on two-stage amplification mechanism is designed, which amplifies the output displacement of the driving feet by two-stage amplification mechanism, and improves the driving efficiency of the actuator stator by the way of alternating driving. We present an inchworm piezoelectric actuator with three piezoelectric stacks and a two-stage amplification mechanism, which is simple in structure design, compact in actuator structure and easy to realize alternate driving. The kinematics and dynamics models of the inchworm piezoelectric actuator are established by analyzing the flexible hinge and its structure with the pseudo-rigid body method. The length of the lever structure and the angle of the triangular structure of the piezoelectric actuator are solved by kinematics, and the natural frequency of the whole structure is calculated by dynamics. Through finite element analysis, the simulation magnification ratio of the piezoelectric actuator is obtained, so as to evaluate and verify the theoretical calculation and further optimize the structure. The experimental results show that the inchworm piezoelectric linear actuator using two-stage amplification mechanism has a high driving speed of 5.53 mm/s under voltage of 135 V and frequency of 70 Hz.
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