Semiconductor fabrication has increasingly demanded improved control of process parameters related to equipment temperature, such as heating and cooling speed and temperature uniformity of the wafer chuck. We perform preliminary thermal-electrical analysis of a heating chuck with a planar heating element, to investigate the feasibility of a planar heating element for plasma-assisted deposition equipment. We propose and optimize circular electrode patterns for the planar heating element of a 6 inch heating chuck design to improve temperature uniformity of the wafer chuck. Using an Analysis System numerical study, we achieve a superior temperature uniformity profile compared to conventional coil-type heating elements.
The aim of this study is the development of the UV-curable polyurethane acrylate-based transparent nanocomposite by using electrospun nylon 6 nanofibers as reinforcement. To accomplish the perfect embedment of nylon 6 nanofibers, over-coating is the leading advantage on account of the ultrafast wetting and chemical interaction with the UV-curable PUA matrix system. The remarkable properties of nylon 6 nanofibers offer the use of a very tiny amount of nanofibers as reinforcement in developing nanocomposites, which allowed a significant improvement of the mechanical properties. We developed optically transparent and flexible nanocomposite films and coatings based on casting, electrospinning, and UV-curing. The reinforcement of nanofibers in the nanocomposites maintains 89%-93% optical transmittance in the visible light range with remarkable enhancement of the tensile strength by 85% for 240 min nanofiber deposition in nanocomposite films. The annexed results generated much consideration and proved that the embedment of nylon 6 nanofibers leads to a wide range of applications for pre-coated metals. The morphologies of the nanofibers and properties of the thin film composites were also investigated. The potential utilization of nanofibers as a reinforcement and the fabrication of a nanocomposite along with its characterization comparably to the UV-cured polyurethane acrylate film are also discussed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.