In response to the rising need for flexible and lightweight materials capable of efficient heat transport, many studies have been conducted to improve the thermal properties of polymers via nanofillers. Among the various nanofillers, carbon nanotubes (CNTs) are considered as the most promising, owing to their excellent thermal and electrical properties. Accordingly, CNT/polymer composites can be used as flexible and lightweight heat transfer materials, owing to their low density. In this study, we fabricated multi-walled CNT (MWCNT)/polymer composites with different aspect ratios to investigate their effects on electrical and thermal properties. Through a three-roll milling process, CNTs were uniformly dispersed in the polymer matrix to form a conductive network. Enhanced electrical and thermal properties were observed in MWCNT composite with a high aspect ratio as compared to those with a low aspect ratio. The thermal conductivity of composites obtained as a function of the filler content was also compared with the results of a theoretical prediction model.
Cost reduction of Double Patterning processes is one of the key areas of development for materials vendors. Among the various possible approaches, spin-on freeze coatings are particularly attractive since they can provide a combination of high imaging performance and high flexibility in terms of resist selection. This paper reports on the development of a new material for spin-on freeze double patterning, AZ® SOLID™ Coating. A suggested mechanism of action is proposed based on FT-IR studies, and the performance of the material in terms of structure quality, process window, impact on LWR, CD uniformity, and resist compatibility is described.
Bottom Anti-Reflective Coatings (BARCs) have been widely used in the lithography process for decades. BARCs play important roles in controlling reflections and therefore improving swing ratios, CD variations, reflective notching, and standing waves. The implementation of BARC processes in 193nm dry and immersion lithography has been accompanied by defect reduction challenges on fine patterns. Point-of-Use filters are well known among the most critical components on a track tool ensuring low wafer defects by providing particle-free coatings on wafers. The filters must have very good particle retention to remove defect-causing particulate and gels while not altering the delicate chemical formulation of photochemical materials.This paper describes a comparative study of the efficiency and performance of various Point-of-Use filters in reducing defects observed in BARC materials. Multiple filter types with a variety of pore sizes, membrane materials, and filter designs were installed on an Entegris Intelligent® Mini dispense pump which is integrated in the coating module of a clean track. An AZ ® 193nm organic BARC material was spin-coated on wafers through various filter media. Lithographic performance of filtered BARCs was examined and wafer defect analysis was performed. By this study, the effect of filter properties on BARC process related defects can be learned and optimum filter media and design can be selected for BARC material to yield the lowest defects on a coated wafer.
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