Silicon oxycarbide (SiOC) is an interesting polymer-derived system that can be tailored to embody many different properties such as lightweight, electrochemical activity, and high temperature stability. One intriguing property that has not been fully explored is the electrical conductivity for the carbon-rich SiOC compositions. In this study, a carbon-rich SiOC system is created based on the crosslinking and pyrolysis of polyhydromethylsiloxane (PHMS) and divinylbenzene (DVB) mixed precursors. The carbonrich nature can effectively delay SiOC phase separation and crystallization into SiO 2 and SiC during pyrolysis. In an oxidizing air atmosphere, the SiOC materials are stable up to 1000 1C with o0.5 wt% weight loss. Before the onset of electrical conductivity drop at B400 1C, the material has electrical conductivity as high as 4.28 S cm À1. In an inert argon atmosphere, the conductivity is as high as 4.64 S cm À1.This new semi-conducting behavior with high thermal stability presents promising application potential for high temperature MEMS devices, protective coatings, and bulk semi-conducting components that must endure high temperature conditions.

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Silicon oxycarbide (SiOC) is a promising protective coating material. However, so far there has not been any comprehensive review to systematically evaluate the characteristics and properties of this material as coatings. In this review, SiOC compositions and fillers are examined based on their fundamental functions in the coating materials. From a processing point of view, different coating formation processes, such as plasma-enhanced chemical vapour deposition, dip coating, and spin coating, are discussed. As an intrinsic requirement and one of the most challenging aspects for SiOC to be used as coating materials, the stability of SiOC in air conditions is analysed and the degradation mechanisms of SiOC are discussed. Lastly, for different application needs, the physical and mechanical behaviours, electrical conductivity, and optical property of the coatings are presented. This first-ever systematic review on the SiOC system as coating materials is intended to provide guidance for future SiOC coating development.