There exist growing demands for robust, reliable, low-cost and easy-to-use sensor systems capable of performing multiparameter analysis for biomedical diagnostics. We have recently demonstrated a particularly economic approach to analyze large arrays of microring resonator (MRR) sensor elements coupled to a single bus waveguide. The sensor elements can be individually functionalized to specifically promote the accumulation of target molecules. The binding of target molecules to the surface of a particular MRR results in a resonance displacement to longer wavelengths, which can be measured with high accuracy. In order to measure the response of the individual MRR from an array to external stimuli, we employ a special frequency modulation scheme in which each MRR is independently modulated and phase sensitive lock-in detection is used to filter the respective frequency component from the superimposed complex transmission spectrum of the bus waveguide. We fabricated test arrays comprising up to 12 MRR coupled to a single bus waveguide. A silicon nitride based material system was chosen to fabricate the devices. Each element of an array is equipped with a platinum heater electrode for thermo-optical modulation. A clear readout of the individual MRR resonance frequencies was possible by employing the modulation scheme above. Furthermore, we demonstrated a bulk refractive index sensitivity of 190 nm/RIU for a frequency modulated MRR. With our first results, we point out the large potential for multiplexed label-free detection of diverse bio molecular compounds. Due to the miniaturization of the multisensor arrays the realization of portable sensor systems will be feasible.
We have recently demonstrated a particularly economic approach to analyze large arrays of microring resonator (MRR) sensor elements coupled to a single bus waveguide. The sensor elements can be individually functionalized to specifically promote the accumulation of target molecules. The binding of target molecules to the surface of a particular MRR results in an increase of its resonance wavelengths which can be measured with high accuracy. In order to measure the response of the individual MRR from an array to external stimuli, we employ a special frequency modulation scheme in which each MRR is independently modulated and phase sensitive lock-in detection is used to filter the respective frequency component from the superimposed complex transmission spectrum of the bus waveguide. We fabricated test arrays comprising up to 12 MRR coupled to a single bus waveguide. A silicon nitride based material system was chosen to realize the devices. Each element of an array is equ ipped with a platinum heater electrode for thermo-optical modulation. A tunable laser system was used for optical characterization and a clear readout of the individual MRR resonance frequencies was possible by employing the modulation scheme above. Furthermore, we demonstrated a bulk refractive index sensitivity of 190 nm/RIU for a frequency modulated MRR. With our first results, we point out the large potential for multiplexed label-free detection of diverse bio molecular compounds. Due to the miniaturization of the multisensor arrays the realization of portable sensor systems will be feasible
In this paper we demonstrate the ability to analyze a multiple of miniaturized bus-integrated sensor elements at high sensitivity from the superimposed complex overall spectrum by individual frequency modulation of optical microring resonators (MRR) fed by a single bus waveguide. The diverse sensor elements can be coated with biochemically selective adlayers (e.g., antibody molecules) to specifically promote the accumulation of target molecules on the MRR surface. Adhesion of target molecules results in an increase of the MRR resonance frequencies which can be measured at high sensitivity with a picometer accuracy. Readout of each MRR from the complex overall spectrum is performed by using phase sensitive lock-in detection to filter out the individual and selective response to external stimuli. We fabricated test arrays with 12 MRR elements based on silicon nitride material, each element integrated with a heater electrode for thermo-optical modulation of the MRR. A clea r readout of the individual MRR by using a tuneable laser source is accomplished in a simple and reliable manner via lock-in detection despite strong overlap of the individual resonances. With our first results, we point out the large potential for multiplexed label-free detection of diverse biomolecular compounds
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